Soft X-Rays and Extreme Ultraviolet Radiation: Principles by David Attwood

By David Attwood

This distinctive, finished ebook describes the basic houses of sentimental X-rays and severe ultraviolet (EUV) radiation and discusses their purposes in a wide selection of fields, together with EUV lithography for semiconductor chip manufacture and tender X-ray biomicroscopy. the writer starts by means of proposing the correct easy ideas comparable to radiation and scattering, wave propagation, diffraction, and coherence. He then is going directly to study a vast diversity of phenomena and purposes. the subjects lined comprise spectromicroscopy, EUV astronomy, synchrotron radiation, and tender X-ray lasers. the writer additionally offers a wealth of helpful reference fabric equivalent to electron binding energies, attribute emission traces and photo-absorption cross-sections. The publication might be of significant curiosity to graduate scholars and researchers in engineering, physics, chemistry, and the existence sciences. it is going to additionally entice practicing engineers taken with semiconductor fabrication and fabrics science.

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